Invention Grant
- Patent Title: Methods for manufacturing a phase-change memory device
- Patent Title (中): 相变存储器件的制造方法
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Application No.: US12762560Application Date: 2010-04-19
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Publication No.: US08133429B2Publication Date: 2012-03-13
- Inventor: Yong-Ho Ha , Bong-Jin Kuh , Han-Bong Ko , Doo-Hwan Park , Sang-Wook Lim , Hee-Ju Shin
- Applicant: Yong-Ho Ha , Bong-Jin Kuh , Han-Bong Ko , Doo-Hwan Park , Sang-Wook Lim , Hee-Ju Shin
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Consulting, PLLC
- Priority: KR10-2006-94217 20060927
- Main IPC: B28B1/00
- IPC: B28B1/00 ; C23C14/06

Abstract:
In a method of forming a chalcogenide compound target, a first powder including germanium carbide or germanium is prepared, and a second powder including antimony carbide or antimony is prepared. A third powder including tellurium carbide or tellurium is prepared. A powder mixture is formed by mixing the first to the third powders. After a shaped is formed body by molding the powder mixture. The chalcogenide compound target is obtained by sintering the powder mixture. The chalcogenide compound target may include a chalcogenide compound that contains carbon and metal, or carbon, metal and nitrogen considering contents of carbon, metal and nitrogen, so that a phase-change material layer formed using the chalcogenide compound target may stable phase transition, enhanced crystallized temperature and increased resistance. A phase-change memory device including the phase-change material layer may have reduced set resistance and driving current while improving durability and sensing margin.
Public/Granted literature
- US20100197076A1 METHODS FOR MANUFACTURING A PHASE-CHANGE MEMORY DEVICE Public/Granted day:2010-08-05
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