Invention Grant
- Patent Title: Apparatus and method for mounting pellicle
- Patent Title (中): 用于安装防护薄膜的装置和方法
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Application No.: US12230473Application Date: 2008-08-29
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Publication No.: US08133640B2Publication Date: 2012-03-13
- Inventor: Sang-hee Lee , Jin Choi
- Applicant: Sang-hee Lee , Jin Choi
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2007-0087281 20070829
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G03B27/62
Abstract:
An apparatus and a method for mounting a pellicle includes a pellicle compression plate formed to apply a plurality of particular pressures to a plurality of points or areas of a region of the reticle where a pellicle frame of the pellicle contacts a reticle.
Public/Granted literature
- US20090073415A1 Apparatus and method for mounting pellicle Public/Granted day:2009-03-19
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