发明授权
- 专利标题： Mirror device with an anti-stiction layer
- 专利标题（中）： 具有防静电层的镜面装置
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申请号： US12151219申请日： 2008-05-02
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公开(公告)号： US08134772B2公开(公告)日： 2012-03-13
- 发明人: Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
- 申请人： Yoshihiro Maeda , Fusao Ishii , Kazuhiro Watanabe , Hirotoshi Ichikawa
- 申请人地址： JP JP
- 专利权人： Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人： Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人地址： JP JP
- 代理商 Bo-In Lin
- 主分类号： G02B26/00
- IPC分类号： G02B26/00
摘要：
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
公开/授权文献
- US20110058247A1 Mirror device with an anti-stiction layer 公开/授权日：2011-03-10
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