Invention Grant
- Patent Title: Semiconductor structures including dual fins
- Patent Title (中): 半导体结构包括双鳍
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Application No.: US12944529Application Date: 2010-11-11
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Publication No.: US08138526B2Publication Date: 2012-03-20
- Inventor: Aaron R. Wilson , Larson Lindholm , David Hwang
- Applicant: Aaron R. Wilson , Larson Lindholm , David Hwang
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Fin-FET (fin field effect transistor) devices and methods of fabrication are disclosed. The Fin-FET devices include dual fin structures that may form a channel region between a source region and a drain region. In some embodiments, the dual fin structures are formed by thinning shallow trench isolation structures, using a pair of shallow trench isolation (STI) structures as a mask to define a recess in a portion of the substrate between the pair of STI structures, and recessing the pair of STI structures so that the resulting dual fin structure protrudes from an active surface of the substrate. The dual fin structure may be used to form single-gate, double-gate or triple-gate fin-FET devices. Electronic systems including such fin-FET devices are also disclosed.
Public/Granted literature
- US20110057269A1 SEMICONDUCTOR STRUCTURES INCLUDING DUAL FINS Public/Granted day:2011-03-10
Information query
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