Invention Grant
US08138665B2 Liquid metal wetting of micro-fabricated charge-emission structures 失效
微电子发射结构的液态金属润湿

Liquid metal wetting of micro-fabricated charge-emission structures
Abstract:
Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to provide the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.
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