Invention Grant
- Patent Title: Methods and systems for utilizing design data in combination with inspection data
- Patent Title (中): 利用设计数据结合检验数据的方法和系统
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Application No.: US13115957Application Date: 2011-05-25
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Publication No.: US08139843B2Publication Date: 2012-03-20
- Inventor: Ashok Kulkarni , Brian Duffy , Kais Maayah , Gordon Rouse
- Applicant: Ashok Kulkarni , Brian Duffy , Kais Maayah , Gordon Rouse
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Technologies Corp.
- Current Assignee: KLA-Tencor Technologies Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.
Public/Granted literature
- US20110286656A1 METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA Public/Granted day:2011-11-24
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