发明授权
- 专利标题: Evaluation object pattern determining apparatus, evaluation object pattern determining method, evaluation object pattern determining program and pattern evaluating system
- 专利标题(中): 评估对象图案确定装置,评价对象图案确定方法,评价对象图案确定程序和图案评价系统
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申请号: US12257551申请日: 2008-10-24
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公开(公告)号: US08139845B2公开(公告)日: 2012-03-20
- 发明人: Takashi Noguchi , Shigetoshi Sameshima , Shigeki Kurihara , Tamao Ishikawa , Yutaka Tandai
- 申请人: Takashi Noguchi , Shigetoshi Sameshima , Shigeki Kurihara , Tamao Ishikawa , Yutaka Tandai
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2007-277071 20071025
- 主分类号: G06K9/62
- IPC分类号: G06K9/62
摘要:
There is provided an evaluation object pattern determining apparatus capable of determining local patterns to be evaluated. The apparatus is for use in a pattern evaluating system storing patterns of a LSI chip as CAD data, picking out coordinates of local patterns whose process margin is small from the CAD data by way of simulation and assisting observation of the local patterns produced in a fabrication line. The apparatus includes a risk level map creating section for creating risk level maps in which risk areas are disposed. The risk area is assigned with a risk level obtained by digitizing that the risk area is an area whose process margin is smaller than other areas. The apparatus also includes a superimposition processing section for superimposing the coordinates of the local patterns with the risk level map to pick out the coordinates of the local patterns located within the risk area.
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