发明授权
US08141168B2 Scanning probe microscope and a method to measure relative-position between probes
有权
扫描探针显微镜和测量探针之间相对位置的方法
- 专利标题: Scanning probe microscope and a method to measure relative-position between probes
- 专利标题(中): 扫描探针显微镜和测量探针之间相对位置的方法
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申请号: US12374775申请日: 2007-07-27
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公开(公告)号: US08141168B2公开(公告)日: 2012-03-20
- 发明人: Tomonobu Nakayama , Seiji Higuchi
- 申请人: Tomonobu Nakayama , Seiji Higuchi
- 申请人地址: JP Ibaraki JP Kyoto
- 专利权人: National Institute for Materials Science,Horiba, Ltd.
- 当前专利权人: National Institute for Materials Science,Horiba, Ltd.
- 当前专利权人地址: JP Ibaraki JP Kyoto
- 优先权: JPP2006-207230 20060728
- 国际申请: PCT/JP2007/064773 WO 20070727
- 国际公布: WO2008/013268 WO 20080131
- 主分类号: G01Q10/00
- IPC分类号: G01Q10/00 ; G01Q20/00
摘要:
A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope comprises multiple probes 21, 22, 23, 24 movable in the XYZ-directions, a stage 3 on which a specimen W is placed and that is movable in the XY-directions, a detecting part 6 that detects the physical properties that changes with the movements of each of the probes 21, 22, 23, 24 in the Z-direction according to the surface shape of the specimen W, at a time when each of the probes 21, 22, 23, 24 or the stage 3 is moved in the XY-directions, an image generating part 73 that images the surface image of the specimen W in response to the detected signals from the detecting part 6, and a relative position calculating part 75 that obtains the surface image based on each of the probes 21, 22, 23, 24 and obtained by the image generating part 73, when the stage 3 is moved in the XY-directions without changing a relative position between the probes 21, 22, 23 24 in the XY-directions, and calculates the relative position between the probes 21, 22, 23, 24 by checking the surface images obtained by the probes.
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