Invention Grant
US08143579B2 Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer 有权
辐射热测量仪的电阻材料,使用该材料的红外探测器的测辐射热仪,以及制造测辐射热计的方法

Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer
Abstract:
A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.
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