Invention Grant
US08143579B2 Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer
有权
辐射热测量仪的电阻材料,使用该材料的红外探测器的测辐射热仪,以及制造测辐射热计的方法
- Patent Title: Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer
- Patent Title (中): 辐射热测量仪的电阻材料,使用该材料的红外探测器的测辐射热仪,以及制造测辐射热计的方法
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Application No.: US12859466Application Date: 2010-08-19
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Publication No.: US08143579B2Publication Date: 2012-03-27
- Inventor: Woo Seok Yang , Sang Hoon Cheon , Seong Mok Cho , Ho Jun Ryu , Chang Auck Choi
- Applicant: Woo Seok Yang , Sang Hoon Cheon , Seong Mok Cho , Ho Jun Ryu , Chang Auck Choi
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2009-0082675 20090902; KR10-2010-0026290 20100324
- Main IPC: G01J5/20
- IPC: G01J5/20

Abstract:
A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.
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