Invention Grant
US08143656B2 High performance one-transistor DRAM cell device and manufacturing method thereof
有权
高性能单晶体管DRAM单元器件及其制造方法
- Patent Title: High performance one-transistor DRAM cell device and manufacturing method thereof
- Patent Title (中): 高性能单晶体管DRAM单元器件及其制造方法
-
Application No.: US12200929Application Date: 2008-08-28
-
Publication No.: US08143656B2Publication Date: 2012-03-27
- Inventor: Jong-Ho Lee , Ki-Heung Park
- Applicant: Jong-Ho Lee , Ki-Heung Park
- Applicant Address: KR
- Assignee: SNU R&DB Foundation
- Current Assignee: SNU R&DB Foundation
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2007-0086516 20070828
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
Provided are a high-performance one-transistor floating-body DRAM cell device and a manufacturing method thereof. The one-transistor floating-body DRAM cell device includes: a semiconductor substrate; a gate stack which is formed on the semiconductor substrate; a control electrode which is formed on the semiconductor substrate and surrounded by the gate stack; a floating body which is formed on the control electrode that is surrounded by the gate stack; source/drain which are formed at left and right sides of the floating body; an insulating layer which insulates the source/drain from the semiconductor substrate and the control electrode; a gate insulating layer which is formed on the floating body and the source/drain; and a gate electrode which is formed on the gate insulating layer. In the cell device having a double-gate structure, charges can be stored in a non-volatile manner by the control electrodes, so that it is possible to improve a degree of integration of devices, a uniformity of characteristic, and a sensing margin.
Public/Granted literature
- US20100102372A1 HIGH PERFORMANCE ONE-TRANSISTOR DRAM CELL DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2010-04-29
Information query
IPC分类: