Invention Grant
US08144329B2 Low power RF tuning using optical and non-reflected power methods
有权
使用光学和非反射功率方法的低功率RF调谐
- Patent Title: Low power RF tuning using optical and non-reflected power methods
- Patent Title (中): 使用光学和非反射功率方法的低功率RF调谐
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Application No.: US13177442Application Date: 2011-07-06
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Publication No.: US08144329B2Publication Date: 2012-03-27
- Inventor: James P. Cruse , Theresa Kramer Guarini , Jeffrey Charles Pierce
- Applicant: James P. Cruse , Theresa Kramer Guarini , Jeffrey Charles Pierce
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, L.L.P
- Main IPC: G01N21/55
- IPC: G01N21/55
Abstract:
Aspects of the present invention include methods for controlling a plasma in a substrate processing system. One embodiment provides controlling a first set of wavelength intensities of reflected electromagnetic radiation reflected from the plasma within a chamber before processing a first set of one or more substrates, associating the first set of wavelength intensities of reflected electromagnetic radiation to an RF power within the processing system, adjusting a matching circuit based on the first set of wavelength intensities of reflected electromagnetic radiation, processing the first set of one or more substrates in the substrate processing system, controlling a second set of wavelength intensities of reflected electromagnetic radiation reflected from the plasma within the chamber, and associating the second set of wavelength intensities of reflected electromagnetic radiation to the RF power within the processing system.
Public/Granted literature
- US20110263050A1 LOW POWER RF TUNING USING OPTICAL AND NON-REFLECTED POWER METHODS Public/Granted day:2011-10-27
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