发明授权
- 专利标题: Temperature measurement apparatus and method
- 专利标题(中): 温度测量装置及方法
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申请号: US12399431申请日: 2009-03-06
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公开(公告)号: US08144332B2公开(公告)日: 2012-03-27
- 发明人: Jun Abe , Tatsuo Matsudo , Chishio Koshimizu
- 申请人: Jun Abe , Tatsuo Matsudo , Chishio Koshimizu
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2008-059027 20080310
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/02
摘要:
A temperature measurement apparatus includes a light source; a first splitter that splits a light beam into a measurement beam and a reference beam; a reference beam reflector that reflects the reference beam; an optical path length adjustor; a second splitter that splits the reflected reference beam into a first reflected reference beam and a second reflected reference beam; a first photodetector that measures an interference between the first reflected reference beam and a reflected measurement beam obtained by the measurement beam reflected from a target object; a second photodetector that measures an intensity of the second reflected reference beam; and a temperature calculation unit. The temperature calculation unit calculates a location of the interference by subtracting an output signal of the second photodetector from an output signal of the first photodetector, and calculates a temperature of the target object from the calculated location of the interference.
公开/授权文献
- US20090228234A1 TEMPERATURE MEASUREMENT APPARATUS AND METHOD 公开/授权日:2009-09-10
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