Invention Grant
- Patent Title: System method and apparatus for selecting and controlling light source bandwidth
- Patent Title (中): 选择和控制光源带宽的系统方法和装置
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Application No.: US12605306Application Date: 2009-10-23
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Publication No.: US08144739B2Publication Date: 2012-03-27
- Inventor: Efrain Figueroa , William N. Partlo , John Martin Algots
- Applicant: Efrain Figueroa , William N. Partlo , John Martin Algots
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Martine Penilla Group, Inc.
- Main IPC: H01S3/10
- IPC: H01S3/10

Abstract:
The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.
Public/Granted literature
- US20100149647A1 System Method and Apparatus for Selecting and Controlling Light Source Bandwidth Public/Granted day:2010-06-17
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