Invention Grant
- Patent Title: Method of producing a biosensor
- Patent Title (中): 生物传感器的制造方法
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Application No.: US13028684Application Date: 2011-02-16
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Publication No.: US08148213B2Publication Date: 2012-04-03
- Inventor: Hiroaki Kikuchi , Tomoaki Yamabayashi , Osamu Takahashi
- Applicant: Hiroaki Kikuchi , Tomoaki Yamabayashi , Osamu Takahashi
- Applicant Address: JP Tokyo
- Assignee: Mitsumi Electric Co., Ltd.
- Current Assignee: Mitsumi Electric Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Washida & Associates
- Priority: JP2010-032625 20100217
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/8232 ; H01L21/335 ; H01L21/84
Abstract:
A method for manufacturing a biosensor includes forming a laminate of a first silicon oxide film and a polysilicon film on one surface of a silicon substrate; forming a second silicon oxide film on the other surface of the silicon substrate; forming a source electrode, a drain electrode, and a channel on the first silicon oxide film, the channel connecting the source electrode and the drain electrode; and removing the polysilicon film.
Public/Granted literature
- US20110212562A1 METHOD OF PRODUCING A BIOSENSOR Public/Granted day:2011-09-01
Information query
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