Invention Grant
- Patent Title: MEMS device with controlled electrode off-state position
- Patent Title (中): 具有受控电极关闭状态位置的MEMS器件
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Application No.: US12518690Application Date: 2007-12-10
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Publication No.: US08149076B2Publication Date: 2012-04-03
- Inventor: Peter G. Steeneken
- Applicant: Peter G. Steeneken
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP06125882 20061212
- International Application: PCT/IB2007/054989 WO 20071210
- International Announcement: WO2008/072163 WO 20080619
- Main IPC: H01H51/22
- IPC: H01H51/22
Abstract:
The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The MEMS device further comprises at least one deformation electrode. The second electrode or the suspension structure or both are plastically deformable upon application of an electrostatic deformation force via the deformation electrode. This way, variations in the off-state position of the second electrode that occur during fabrication of different devices or during operation of a single device can be eliminated.
Public/Granted literature
- US20100025206A1 MEMS DEVICE WITH CONTROLLED ELECTRODE OFF-STATE POSITION Public/Granted day:2010-02-04
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