发明授权
- 专利标题: Self-inflated micro-glass blowing
- 专利标题(中): 自充气微玻璃吹
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申请号: US12113927申请日: 2008-05-01
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公开(公告)号: US08151600B2公开(公告)日: 2012-04-10
- 发明人: Erik Jesper Eklund , Andrei M Shkel
- 申请人: Erik Jesper Eklund , Andrei M Shkel
- 申请人地址: US CA Oakland
- 专利权人: The Regents of the University of California
- 当前专利权人: The Regents of the University of California
- 当前专利权人地址: US CA Oakland
- 代理商 Marcus C. Dawes; Daniel L. Dawes
- 主分类号: C03B9/31
- IPC分类号: C03B9/31 ; C03B19/08 ; C03B19/10
摘要:
A method for glass-blowing on a microscopic level includes the steps of defining a plurality of microholes in a wafer, disposing a sheet of thermally formable material onto the wafer covering the microholes, heating the sheet of thermally formable material until a predetermined degree of plasticity is achieved, applying self-induced fluidic pressure by expansion of the heated trapped gas in the microholes to the sheet of thermally formable material, while the sheet is still plastic, and simultaneously forming a plurality of blown micro-objects in the sheet on the wafer by means of continued application of pressure for a predetermined time.
公开/授权文献
- US20080280124A1 SELF-INFLATED MICRO-GLASS BLOWING 公开/授权日:2008-11-13
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