发明授权
- 专利标题: Infrared sensor and manufacturing method thereof
- 专利标题(中): 红外线传感器及其制造方法
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申请号: US12958556申请日: 2010-12-02
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公开(公告)号: US08153976B2公开(公告)日: 2012-04-10
- 发明人: Tzong-Sheng Lee
- 申请人: Tzong-Sheng Lee
- 申请人地址: TW Hsinchu
- 专利权人: Unimems Manufacturing Co., Ltd.
- 当前专利权人: Unimems Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Nikolai & Mersereau, P.A.
- 代理商 C. G. Mersereau
- 优先权: TW99129070A 20100830
- 主分类号: G01J5/00
- IPC分类号: G01J5/00
摘要:
A manufacturing method for an infrared sensor includes the following steps: providing a wafer having several chips and a substrate; forming four soldering portions, a thermistor, and an infrared sensing layer on the bottom surface of each chip, wherein the soldering portions are connected electrically to the thermistor and the infrared sensing layer; disposing a soldering material onto at least one bonding location for each soldering portion; backside-etching each chip of the wafer to form a sensing film and a surrounding wall around the sensing film; bonding the wafer and the substrate; heating the soldering materials to connect the substrate and each chip of the wafer; disposing an infrared filter on the surrounding wall of each chip; cutting the wafer and the substrate to form a plurality of individual infrared sensors. The instant disclosure further provides an associated infrared sensor.
公开/授权文献
- US20120049066A1 INFRARED SENSOR AND MANUFACTURING METHOD THEREOF 公开/授权日:2012-03-01
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