Invention Grant
US08154722B2 Sensor element structure, sensor element array, and manufacturing method of sensor element array 有权
传感器元件结构,传感器元件阵列和传感器元件阵列的制造方法

Sensor element structure, sensor element array, and manufacturing method of sensor element array
Abstract:
Even when only a few antigens exist in a specimen, a change in a dielectric constant and a change in an optical spectrum accompanied thereto in the periphery of a conductive member are made larger, so that sensing at high sensitivity can be performed. A structure including a protrusion including a dielectric material protruded on a substrate and a conductive member provided on a first surface of the protrusion, in which the maximum value of the cross-sectional area in the cross-section in parallel with a first surface of the conductive member is larger than the area of the first surface.
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