发明授权
US08159020B2 Non-volatile two transistor semiconductor memory cell and method for producing the same
有权
非挥发性双晶体管半导体存储单元及其制造方法
- 专利标题: Non-volatile two transistor semiconductor memory cell and method for producing the same
- 专利标题(中): 非挥发性双晶体管半导体存储单元及其制造方法
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申请号: US12561905申请日: 2009-09-17
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公开(公告)号: US08159020B2公开(公告)日: 2012-04-17
- 发明人: Franz Schuler , Georg Tempel
- 申请人: Franz Schuler , Georg Tempel
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 优先权: DE10201303 20020115
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L29/788 ; H01L21/8247
摘要:
The invention relates to a nonvolatile two-transistor semiconductor memory cell and an associated fabrication method, source and drain regions (2 ) for a selection transistor (AT) and a memory transistor (ST) being formed in a substrate (1). The memory transistor (ST) has a first insulation layer (3 ), a charge storage layer (4), a second insulation layer (5) and a memory transistor control layer (6), while the selection transistor (AT) has a first insulation layer (3 ′) and a selection transistor control layer (4*). By using different materials for the charge storage layer (4) and the selection transistor control layer (4*), it is possible to significantly improve the charge retention properties of the memory cell by adapting the substrate doping with electrical properties remaining the same.
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