发明授权
- 专利标题： Illumination system coherence remover with a series of partially reflective surfaces
- 专利标题（中）： 照明系统相干去除器与一系列部分反射表面
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申请号： US12328204申请日： 2008-12-04
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公开(公告)号： US08159651B2公开(公告)日： 2012-04-17
- 发明人: Huibert Visser , Jacob Fredrik Friso Klinkhamer , Lev Ryzhikov , Scott D. Coston , Adel Joobeur , Rob Vink , Yevgeniy Shmarev
- 申请人： Huibert Visser , Jacob Fredrik Friso Klinkhamer , Lev Ryzhikov , Scott D. Coston , Adel Joobeur , Rob Vink , Yevgeniy Shmarev
- 申请人地址： NL Veldhoven NL Veldhoven
- 专利权人： ASML Holding N.V.,ASML Netherlands B.V.
- 当前专利权人： ASML Holding N.V.,ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven NL Veldhoven
- 代理机构： Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号： G03B27/72
- IPC分类号： G03B27/72
摘要：
A coherence remover includes a first partially reflective surface and a second partially reflective surface. The coherence remover is configured to receive an input beam. Each of the first and second reflective surfaces is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
公开/授权文献
- US20090168072A1 Illumination System 公开/授权日：2009-07-02