Invention Grant
- Patent Title: Method of producing a suspended membrane device
- Patent Title (中): 悬浮膜装置的制造方法
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Application No.: US12265256Application Date: 2008-11-05
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Publication No.: US08163586B2Publication Date: 2012-04-24
- Inventor: Patrice Rey , Mouna Salhi
- Applicant: Patrice Rey , Mouna Salhi
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: FR0758915 20071109
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for producing a device with at least one suspended membrane, including the following steps: Producing a trench through a first sacrificial layer and a second layer deposited on the first sacrificial layer, the trench completely surrounding at least a portion of the first sacrificial layer and at least a portion of the second layer, filling all or a portion of the trench with at least one material capable of resisting at least one etching agent, and etching the portion of the first sacrificial layer with the etching agent through at least one opening made in the second layer, the portion of the second layer forming at least one portion of the suspended membrane.
Public/Granted literature
- US20090124035A1 METHOD OF PRODUCING A SUSPENDED MEMBRANE DEVICE Public/Granted day:2009-05-14
Information query
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