发明授权
- 专利标题： System for modifying small structures
- 专利标题（中）： 修改小结构的系统
-
申请号： US12695808申请日： 2010-01-28
-
公开(公告)号： US08163641B2公开(公告)日： 2012-04-24
- 发明人: George Y. Gu , Neil J. Bassom , Thomas J. Gannon , Kun Liu
- 申请人： George Y. Gu , Neil J. Bassom , Thomas J. Gannon , Kun Liu
- 申请人地址： US OR Hillsboro
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： US OR Hillsboro
- 代理机构： Scheinberg & Griner, LLP
- 代理商 Michael O. Scheinberg; David Griner
- 主分类号： H01L21/4763
- IPC分类号： H01L21/4763
摘要：
A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber.
公开/授权文献
- US20100151679A1 SYSTEM FOR MODIFYING SMALL STRUCTURES 公开/授权日：2010-06-17
信息查询
IPC分类:
