发明授权
US08166632B1 Method for providing a perpendicular magnetic recording (PMR) transducer
有权
提供垂直磁记录(PMR)传感器的方法
- 专利标题: Method for providing a perpendicular magnetic recording (PMR) transducer
- 专利标题(中): 提供垂直磁记录(PMR)传感器的方法
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申请号: US12057611申请日: 2008-03-28
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公开(公告)号: US08166632B1公开(公告)日: 2012-05-01
- 发明人: Jinqiu Zhang , Liubo Hong , Yong Shen , Donghong Li
- 申请人: Jinqiu Zhang , Liubo Hong , Yong Shen , Donghong Li
- 申请人地址: US CA Fremont
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Fremont
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00
摘要:
A method and system for providing a PMR transducer including an intermediate layer. The method and system include providing a hard mask layer on the intermediate layer. The hard mask layer is for a reactive ion etch of the intermediate layer. The method and system also include providing a bottom antireflective coating (BARC) layer on the hard mask layer. The BARC layer is also a masking layer for the hard mask layer. The method and system also include forming a trench in the intermediate layer using at least one reactive ion etch (RIE). The trench has a bottom and a top wider than the bottom. The method and system also include providing a PMR pole. At least a portion of the PMR pole resides in the trench.
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