发明授权
US08169868B2 Method for detecting surface defects in patterned media 失效
用于检测图案化介质中表面缺陷的方法

Method for detecting surface defects in patterned media
摘要:
An optical defect detection method for patterned media includes: irradiating a laser beam onto a patterned medium and obtaining reflected light by reflection very close to a sample; outputting the reflected light as an analog electrical signal from an optical receiver; converting the analog signal to a digital signal; obtaining a surface profile in a track direction by sampling the analog signal; obtaining a servo area profile by setting a slice for detecting servo area; calculating an average value in a track width direction based on plural servo area profiles; generating a master servo area profile based on the average value; obtaining a difference between the master servo area profile and the specific servo area profile; and detecting the presence of a defect including surface roughness, process fluctuation, and adhesion of foreign matters, from a differential waveform.
公开/授权文献
信息查询
0/0