发明授权
- 专利标题: Applicator and method for transferring dispersion liquid
- 专利标题(中): 涂布器和分散液转移方法
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申请号: US12149133申请日: 2008-04-28
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公开(公告)号: US08171876B2公开(公告)日: 2012-05-08
- 发明人: Takumi Namekawa , Kei Baba , Yuya Inoue , Masao Murata , Koji Hane , Robert D. Taff , Robert R. McKay , Ralph D. Fox
- 申请人: Takumi Namekawa , Kei Baba , Yuya Inoue , Masao Murata , Koji Hane , Robert D. Taff , Robert R. McKay , Ralph D. Fox
- 申请人地址: JP Chigasaki-shi
- 专利权人: Ulvac, Inc.
- 当前专利权人: Ulvac, Inc.
- 当前专利权人地址: JP Chigasaki-shi
- 代理机构: Kratz, Quintos & Hanson, LLP
- 优先权: JP2005-325990 20051110
- 主分类号: B05C5/02
- IPC分类号: B05C5/02
摘要:
The present invention provides applicators reducing generating bubble. Dispersion liquid is supplied while the pressure of a circulation tank on the delivery side is lower than the atmospheric pressure but higher than the pressure of the space in buffer tanks. The dispersion liquid in the discharge chambers is recovered while the pressure in a circulation tank serving as recovery destination is lower than the atmospheric pressure. Gas dissolution can be reduced because the dispersion liquid does not come into contact with gases at pressures higher than the atmospheric pressure and engulffing gas or deformation of solid microparticles can be avoided because no pump is used.
公开/授权文献
- US20080210160A1 Applicator and method for transferring dispersion liquid 公开/授权日:2008-09-04
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