发明授权
- 专利标题： Method of manufacturing magnetic head for perpendicular magnetic recording including two side shields
- 专利标题（中）： 制造包括两个侧面屏蔽的垂直磁记录磁头的方法
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申请号： US12457090申请日： 2009-06-01
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公开(公告)号： US08173028B2公开(公告)日： 2012-05-08
- 发明人: Kazuo Ishizaki , Yoshitaka Sasaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Cherng-Chyi Han
- 申请人： Kazuo Ishizaki , Yoshitaka Sasaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Cherng-Chyi Han
- 申请人地址： US CA Milpitas
- 专利权人： Headway Technologies, Inc.
- 当前专利权人： Headway Technologies, Inc.
- 当前专利权人地址： US CA Milpitas
- 代理机构： Oliff & Berridge, PLC
- 主分类号： G11B5/127
- IPC分类号： G11B5/127
摘要：
A magnetic head includes a pole layer, first and second side shields, and an encasing layer having first to third grooves that accommodate the pole layer and the first and second side shields. A manufacturing method for the magnetic head includes the step of forming the first to third grooves in a nonmagnetic layer by using an etching mask layer having first to third openings. This step includes the steps of forming the first groove by etching the nonmagnetic layer using the first opening, with the second and third openings covered with a first mask; and forming the second and third grooves by etching the nonmagnetic layer using the second and third openings, with the first opening covered with a second mask.
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