Invention Grant
US08174660B2 Metal line, method of forming the same, and a display using the same
失效
金属线,其形成方法和使用其的显示器
- Patent Title: Metal line, method of forming the same, and a display using the same
- Patent Title (中): 金属线,其形成方法和使用其的显示器
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Application No.: US12332249Application Date: 2008-12-10
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Publication No.: US08174660B2Publication Date: 2012-05-08
- Inventor: Sung Ryul Kim , Yong-Mo Choi , Sung-Hoon Yang , Hwa-Yeul Oh , Kap-Soo Yoon , Jae-Ho Choi , Seong-Hun Kim
- Applicant: Sung Ryul Kim , Yong-Mo Choi , Sung-Hoon Yang , Hwa-Yeul Oh , Kap-Soo Yoon , Jae-Ho Choi , Seong-Hun Kim
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2008-0006698 20080122
- Main IPC: G02F1/1343
- IPC: G02F1/1343

Abstract:
Provided are a metal line, a method of forming the same, and a display using the same. To increase resistance of a metal line having a multilayered structure of CuO/Cu and prevent blister formation, a plasma treatment is performed using a nitrogen-containing gas and a silicon-containing gas or using a hydrogen or argon as and the silicon-containing gas. Accordingly, a plasma treatment layer such as a SiNx or Si layer is thinly formed on the copper layer, thereby preventing an increase in resistance of the copper layer and also preventing blister formation caused by the damage of a copper oxide layer. Consequently, it is possible to improve the reliability of a copper line and thus enhance the reliability of a device.
Public/Granted literature
- US20090185126A1 METAL LINE, METHOD OF FORMING THE SAME, AND A DISPLAY USING THE SAME Public/Granted day:2009-07-23
Information query
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