Invention Grant
- Patent Title: Apparatus and process for hydrogenation of a silicon tetrahalide and silicon to the trihalosilane
- Patent Title (中): 将四卤化硅和硅氢化成三卤代硅烷的装置和方法
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Application No.: US12291115Application Date: 2008-11-05
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Publication No.: US08178051B2Publication Date: 2012-05-15
- Inventor: Stephen Michael Lord
- Applicant: Stephen Michael Lord
- Main IPC: B01J8/24
- IPC: B01J8/24 ; C01B33/107

Abstract:
A reactor for hydrogenation of a silicon tetrahalide and metallurgical grade silicon to trihalosilane includes a bed of metallurgical silicon particles, one or more gas entry ports, one or more solids entry ports, one or more solids drains and one or more ports for removing the trihalosilane from the reactor. Fresh surfaces are generated on the bed particles by internal grinding and abrasion as a result of entraining feed silicon particles in a silicon tetrahalide/hydrogen feed stream entering the reactor and impinging that stream on the bed of silicon particles. This has the advantages of higher yield of the trihalosilane, higher burnup rate of the MGS, removal of spent MGS as a fine dust carryover in the trihalosilane effluent leaving the reactor and longer times between shutdowns for bed removal.
Public/Granted literature
- US20100111804A1 Apparatus and process for hydrogenation of a silicon tetrahalide and silicon to the trihalosilane Public/Granted day:2010-05-06
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