Invention Grant
- Patent Title: Micro electro mechanical device having an opening between a fixing portion and a torsion bar
- Patent Title (中): 具有在固定部分和扭杆之间的开口的微机电装置
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Application No.: US12382133Application Date: 2009-03-09
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Publication No.: US08179582B2Publication Date: 2012-05-15
- Inventor: Yasuhiro Omori , Osamu Tsuboi , Hiromitsu Soneda
- Applicant: Yasuhiro Omori , Osamu Tsuboi , Hiromitsu Soneda
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Priority: JP2008-138847 20080528
- Main IPC: G02B26/08
- IPC: G02B26/08
Abstract:
A micro electro mechanical device includes an inner frame provided with a movable part and an outer frame provided in a circumference of the inner frame. The outer frame has a fixing part fixed by a joining material. A first torsion bar is provided between the outer frame and the inner frame so as to swingably support the inner frame on the outer frame. A first opening is formed in the outer frame in a vicinity of the first torsion bar. The first opening is positioned between the fixing part of the outer frame and the first torsion bar.
Public/Granted literature
- US20090296181A1 Micro electro mechanical device having an opening between a fixing portion and a torsion bar Public/Granted day:2009-12-03
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