发明授权
US08183113B2 Methods of forming recessed gate structures including blocking members, and methods of forming semiconductor devices having the recessed gate structures
失效
形成包括阻挡构件的凹陷栅极结构的方法,以及形成具有凹陷栅极结构的半导体器件的方法
- 专利标题: Methods of forming recessed gate structures including blocking members, and methods of forming semiconductor devices having the recessed gate structures
- 专利标题(中): 形成包括阻挡构件的凹陷栅极结构的方法,以及形成具有凹陷栅极结构的半导体器件的方法
-
申请号: US12784977申请日: 2010-05-21
-
公开(公告)号: US08183113B2公开(公告)日: 2012-05-22
- 发明人: Yong-Sung Kim , Tae-Young Chung , Soo-Ho Shin , Eun-Cheol Lee
- 申请人: Yong-Sung Kim , Tae-Young Chung , Soo-Ho Shin , Eun-Cheol Lee
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2005-0077910 20050824
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A recessed gate structure in a semiconductor device includes a gate electrode partially buried in a substrate, a blocking member formed in the buried portion of the gate electrode, and a gate insulation layer formed between the gate electrode and the substrate. The blocking member may effectively prevent a void or a seam in the buried portion of the gate electrode from contacting the gate insulation layer adjacent to a channel region in subsequent manufacturing processes. Thus, the semiconductor device may have a regular threshold voltage and a leakage current passing through the void or the seam may efficiently decrease.
公开/授权文献
信息查询
IPC分类: