发明授权
US08183113B2 Methods of forming recessed gate structures including blocking members, and methods of forming semiconductor devices having the recessed gate structures 失效
形成包括阻挡构件的凹陷栅极结构的方法,以及形成具有凹陷栅极结构的半导体器件的方法

Methods of forming recessed gate structures including blocking members, and methods of forming semiconductor devices having the recessed gate structures
摘要:
A recessed gate structure in a semiconductor device includes a gate electrode partially buried in a substrate, a blocking member formed in the buried portion of the gate electrode, and a gate insulation layer formed between the gate electrode and the substrate. The blocking member may effectively prevent a void or a seam in the buried portion of the gate electrode from contacting the gate insulation layer adjacent to a channel region in subsequent manufacturing processes. Thus, the semiconductor device may have a regular threshold voltage and a leakage current passing through the void or the seam may efficiently decrease.
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