Invention Grant
- Patent Title: Electromagnetic wave measuring apparatus, measurement method, a program, and a recording medium
- Patent Title (中): 电磁波测量装置,测量方法,程序和记录介质
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Application No.: US12487177Application Date: 2009-06-18
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Publication No.: US08183528B2Publication Date: 2012-05-22
- Inventor: Eiji Kato , Shigeki Nishina , Motoki Imamura , Akiyoshi Irisawa , Tomoyu Yamashita
- Applicant: Eiji Kato , Shigeki Nishina , Motoki Imamura , Akiyoshi Irisawa , Tomoyu Yamashita
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2009-103784 20090422
- Main IPC: G01R23/16
- IPC: G01R23/16

Abstract:
According to the present invention, the CT is carried out based on parameters other than the absorption rate. An electromagnetic wave measurement device includes an electromagnetic wave output device 2 which outputs an electromagnetic wave at a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test 1, an electromagnetic wave detector 4 which detects the electromagnetic wave which has transmitted through the device under test 1, a relative position changing unit 6 which changes a relative position of an intersection 100 at which an optical path of the electromagnetic wave transmitting through the device under test 1 and the device under test 1 intersect with respect to the device under test 1, a phase deriving unit 12 which derives, based on a detected result by the electromagnetic wave detector 4, a phase in the frequency domain of the electromagnetic wave which has transmitted through the device under test 1, a sinogram deriving unit 16 which derives a sinogram based on a derived result by the phase deriving unit 12, and a cross sectional image deriving unit 18 that derives, based on the sinogram, an image of a cross section of the device under test 1 including a trajectory of the intersection 100.
Public/Granted literature
- US20100271001A1 ELECTROMAGNETIC WAVE MEASURING APPARATUS, MEASUREMENT METHOD, A PROGRAM, AND A RECORDING MEDIUM Public/Granted day:2010-10-28
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