发明授权
- 专利标题: Semiconductor memory device
- 专利标题(中): 半导体存储器件
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申请号: US12540896申请日: 2009-08-13
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公开(公告)号: US08183552B2公开(公告)日: 2012-05-22
- 发明人: Shingo Nakajima , Eiji Ito , Mitsuhiro Noguchi
- 申请人: Shingo Nakajima , Eiji Ito , Mitsuhiro Noguchi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2008-208648 20080813; JP2009-060933 20090313
- 主分类号: H01L29/02
- IPC分类号: H01L29/02
摘要:
A semiconductor memory device having a first wiring layer which is provided on a first insulator, and which extends in a first direction, and a non-volatile memory cell which is provided in a pillar shape on the first wiring layer, and which includes a non-ohmic element and variable resistance element connected in series. The resistance value of the variable resistance element changes in accordance with a voltage or current applied thereto. A barrier layer is provided on the memory cell and is configured in an in-plane direction. A conductive layer is provided on the barrier layer and is configured in an in-plane direction. A second insulator is provided on the first insulator and covers side surfaces of the memory cell, the barrier layer, and the conductive layer. A second wiring layer is provided on the conductive layer and extends in a second direction.
公开/授权文献
- US20100038617A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2010-02-18
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