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US08183944B2 Method and system for using a MEMS structure as a timing source 有权
使用MEMS结构作为定时源的方法和系统

Method and system for using a MEMS structure as a timing source
Abstract:
A system and method is disclosed that provides a technique for generating an accurate time base for MEMS sensors and actuators which has a vibrating MEMS structure. The accurate clock is generated from the MEMS oscillations and converted to the usable range by means of a frequency translation circuit.
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