发明授权
US08186077B2 Heating apparatus, heating method, and computer readable storage medium
有权
加热装置，加热方法和计算机可读存储介质
- 专利标题： Heating apparatus, heating method, and computer readable storage medium
- 专利标题（中）： 加热装置，加热方法和计算机可读存储介质
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申请号： US13153660申请日： 2011-06-06
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公开(公告)号： US08186077B2公开(公告)日： 2012-05-29
- 发明人: Tatsuya Kawaji , Yuichi Sakai , Masatoshi Kaneda
- 申请人： Tatsuya Kawaji , Yuichi Sakai , Masatoshi Kaneda
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Smith, Gambrell & Russell, LLP
- 优先权： JP2007-011707 20070122
- 主分类号： F26B11/05
- IPC分类号： F26B11/05
摘要：
A disclosed heating apparatus for heating a substrate on which a film is coated includes a process chamber having a gas supply opening for supplying a first gas to the process chamber and a gas evacuation opening for evacuating the first gas from the process chamber; a heating plate that is arranged in the process chamber and includes a heating element for heating the substrate; plural protrusions arranged on the heating plate so as to support the substrate; plural suction holes formed in the heating plate so as to attract by suction the substrate toward the heating plate; and a gas inlet adapted to supply a second gas to a gap between the heating plate and the substrate supported by the plural protrusions.