Invention Grant
- Patent Title: Hot cathode and ion source including the same
- Patent Title (中): 热阴极和离子源包括相同的
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Application No.: US12511660Application Date: 2009-07-29
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Publication No.: US08188645B2Publication Date: 2012-05-29
- Inventor: Naoki Miyamoto
- Applicant: Naoki Miyamoto
- Applicant Address: JP Kyoto
- Assignee: Nissin Ion Equipment Co., Ltd.
- Current Assignee: Nissin Ion Equipment Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Osha • Liang LLP
- Priority: JP2008-209814 20080818
- Main IPC: H01J9/02
- IPC: H01J9/02
Abstract:
A hot cathode includes: a hollow external conductor; a hollow internal conductor which is placed coaxially inside the external conductor; and a connection conductor which electrically connects tip end portions of the conductors. A heating current is folded back through the connection conductor to flow in opposite directions in the external conductor and the internal conductor.
Public/Granted literature
- US20100038556A1 HOT CATHODE AND ION SOURCE INCLUDING THE SAME Public/Granted day:2010-02-18
Information query
