发明授权
- 专利标题: Liquid ejection head and manufacturing method thereof
- 专利标题(中): 液体喷射头及其制造方法
-
申请号: US12400440申请日: 2009-03-09
-
公开(公告)号: US08191260B2公开(公告)日: 2012-06-05
- 发明人: Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
- 申请人: Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha Kaisha
- 当前专利权人: Canon Kabushiki Kaisha Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2008-064139 20080313
- 主分类号: B21D53/76
- IPC分类号: B21D53/76 ; B23P17/00 ; B41J2/135
摘要:
A manufacturing method of a liquid ejection head includes forming on a substrate a first flow passage wall forming member contacting a solid layer of equal height, exposing a first layer of a negative photosensitive resin material to form an ejection outlet forming member; exposing a second layer, on the first layer, of a negative photosensitive resin material to form a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first and second layers on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming parts of the flow passage and the ejection outlet by removing non-exposed portions of the first and second layers above the substrate; and forming the flow passage by removing the solid layer.
公开/授权文献
- US20090229125A1 LIQUID EJECTION HEAD AND MANUFACTURING METHOD THEREOF 公开/授权日:2009-09-17
信息查询