发明授权
US08192790B2 Electrodes for generating a stable discharge in gas laser systems
有权
用于在气体激光系统中产生稳定放电的电极
- 专利标题: Electrodes for generating a stable discharge in gas laser systems
- 专利标题(中): 用于在气体激光系统中产生稳定放电的电极
-
申请号: US12792625申请日: 2010-06-02
-
公开(公告)号: US08192790B2公开(公告)日: 2012-06-05
- 发明人: Igor Bragin , Rustem Osmanow , Jürgen Bäumler , Michael Semling
- 申请人: Igor Bragin , Rustem Osmanow , Jürgen Bäumler , Michael Semling
- 申请人地址: DE Göttingen
- 专利权人: Coherent GmbH
- 当前专利权人: Coherent GmbH
- 当前专利权人地址: DE Göttingen
- 代理机构: Morrison & Foerster LLP
- 主分类号: H01S3/097
- IPC分类号: H01S3/097 ; H01S3/03 ; H01S3/00 ; H01S3/083
摘要:
Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.
公开/授权文献
信息查询