发明授权
US08193019B2 Vertical cavity surface emitting laser having multiple top-side contacts
有权
具有多个顶侧触点的垂直腔面发射激光器
- 专利标题: Vertical cavity surface emitting laser having multiple top-side contacts
- 专利标题(中): 具有多个顶侧触点的垂直腔面发射激光器
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申请号: US12917449申请日: 2010-11-01
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公开(公告)号: US08193019B2公开(公告)日: 2012-06-05
- 发明人: Ralph H. Johnson , R. Scott Penner , James Robert Biard , Colby Fitzgerald
- 申请人: Ralph H. Johnson , R. Scott Penner , James Robert Biard , Colby Fitzgerald
- 申请人地址: US CA Sunnyvale
- 专利权人: Finisar Corporation
- 当前专利权人: Finisar Corporation
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Maschoff Gilmore & Israelsen
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A VCSEL with undoped mirrors. An essentially undoped bottom DBR mirror is formed on a substrate. A periodically doped first conduction layer region is formed on the bottom DBR mirror. The first conduction layer region is heavily doped at a location where the optical electric field is at about a minimum. An active layer, including quantum wells, is on the first conduction layer region. A periodically doped second conduction layer region is connected to the active layer. The second conduction layer region is heavily doped where the optical electric field is at a minimum. An aperture is formed in the epitaxial structure above the quantum wells. A top mirror coupled to the periodically doped second conduction layer region. The top mirror is essentially undoped and formed in a mesa structure. An oxide is formed around the mesa structure to protect the top mirror during wet oxidation processes.