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US08193472B2 Susceptor 失效
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Susceptor
Abstract:
A susceptor [1] is manufactured by providing a protruding part [8] on the joining surface of a retainer plate [4], and additionally providing a groove part [9] composed of a dovetail groove on the joining surface of a heat transfer plate [3] in a position facing the protruding part [8]. By fitting the protruding part [8] into the groove part [9] and caulking, the heat transfer plate [3] and the retainer plate [4] are conjoined.
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