发明授权
US08198154B2 Method of forming bottom-drain LDMOS power MOSFET structure having a top drain strap
有权
形成具有顶部排水带的底部漏极LDMOS功率MOSFET结构的方法
- 专利标题: Method of forming bottom-drain LDMOS power MOSFET structure having a top drain strap
- 专利标题(中): 形成具有顶部排水带的底部漏极LDMOS功率MOSFET结构的方法
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申请号: US12891485申请日: 2010-09-27
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公开(公告)号: US08198154B2公开(公告)日: 2012-06-12
- 发明人: François Hébert
- 申请人: François Hébert
- 申请人地址: US CA Sunnyvale
- 专利权人: Alpha and Omega Semiconductor Incorporated
- 当前专利权人: Alpha and Omega Semiconductor Incorporated
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: JDI Patent
- 代理商 Joshua D. Isenberg
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L21/336 ; H01L29/66 ; H01L29/78 ; H01L21/70 ; H01L29/786
摘要:
Lateral DMOS devices having improved drain contact structures and methods for making the devices are disclosed. A semiconductor device comprises a semiconductor substrate; an epitaxial layer on top of the substrate; a drift region at a top surface of the epitaxial layer; a source region at a top surface of the epitaxial layer; a channel region between the source and drift regions; a gate positioned over a gate dielectric on top of the channel region; and a drain contact trench that electrically connects the drift layer and substrate. The contact trench includes a trench formed vertically from the drift region, through the epitaxial layer to the substrate and filled with an electrically conductive drain plug; electrically insulating spacers along sidewalls of the trench; and an electrically conductive drain strap on top of the drain contact trench that electrically connects the drain contact trench to the drift region.
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