发明授权
US08198176B2 Method for producing semiconductor chip with adhesive film, adhesive film for semiconductor used in the method, and method for producing semiconductor device 有权
用于制造具有粘合膜的半导体芯片的方法,该方法中使用的半导体用粘合膜以及半导体装置的制造方法

  • 专利标题: Method for producing semiconductor chip with adhesive film, adhesive film for semiconductor used in the method, and method for producing semiconductor device
  • 专利标题(中): 用于制造具有粘合膜的半导体芯片的方法,该方法中使用的半导体用粘合膜以及半导体装置的制造方法
  • 申请号: US12682254
    申请日: 2008-10-07
  • 公开(公告)号: US08198176B2
    公开(公告)日: 2012-06-12
  • 发明人: Keiichi HatakeyamaYuuki Nakamura
  • 申请人: Keiichi HatakeyamaYuuki Nakamura
  • 申请人地址: JP Tokyo
  • 专利权人: Hitachi Chemical Company, Ltd.
  • 当前专利权人: Hitachi Chemical Company, Ltd.
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
  • 优先权: JPP2007-263347 20071009
  • 国际申请: PCT/JP2008/068237 WO 20081007
  • 国际公布: WO2009/048061 WO 20090416
  • 主分类号: H01L21/00
  • IPC分类号: H01L21/00
Method for producing semiconductor chip with adhesive film, adhesive film for semiconductor used in the method, and method for producing semiconductor device
摘要:
The method for producing a semiconductor chip with an adhesive film of the present invention comprises steps of preparing a laminate in which at least a divided semiconductor wafer comprising a plurality of semiconductor chips, obtained by forming a cut which separates the semiconductor wafer into a plurality of semiconductor chips on one side of the semiconductor wafer in a thickness less than that of the semiconductor wafer and by grinding the other side of the semiconductor wafer on which no cut is formed to reach the cut, an adhesive film for a semiconductor and a dicing tape are laminated, the adhesive film for a semiconductor having a thickness in the range of 1 to 15 μm and a tensile elongation at break of less than 5%, and the tensile elongation at break being less than 110% of the elongation at a maximum load; and dividing the adhesive film for a semiconductor by picking up the plurality of semiconductor chips in a laminating direction of the laminate, thereby preparing a semiconductor chip with an adhesive film.
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