发明授权
US08198610B2 Ion implanter with variable aperture and ion implant method thereof
有权
具有可变孔径的离子注入机及其离子注入方法
- 专利标题: Ion implanter with variable aperture and ion implant method thereof
- 专利标题(中): 具有可变孔径的离子注入机及其离子注入方法
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申请号: US12582140申请日: 2009-10-20
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公开(公告)号: US08198610B2公开(公告)日: 2012-06-12
- 发明人: Richard F. McRay
- 申请人: Richard F. McRay
- 申请人地址: US CA San Jose
- 专利权人: Advanced Ion Beam Technology, Inc.
- 当前专利权人: Advanced Ion Beam Technology, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Stout, Uxa, Buyan & Mullins, LLP
- 主分类号: G21K5/10
- IPC分类号: G21K5/10 ; H01J37/02
摘要:
An ion implanter and an ion implant method are disclosed. The ion implanter has an aperture assembly with a variable aperture and is located between an ion source of an ion beam and a holder for holding a wafer. At least one of the size and the shape of the variable aperture is adjustable. The ion beam may be flexibly shaped by the variable aperture, so that the practical implantation on the wafer can be controllably adjusted without modifying an operation of both the ion source and mass analyzer or applying a magnetic field to modify the ion beam. An example of the aperture assembly has two plates, each having an opening formed on its edge such that a variable aperture is formed by a combination of these openings. By respectively moving the plates, the size and the shape of the variable aperture can be changed.
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