发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US12395202申请日: 2009-02-27
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公开(公告)号: US08198698B2公开(公告)日: 2012-06-12
- 发明人: Satoshi Maeda , Yasushi Sekine , Tetsuya Watanabe
- 申请人: Satoshi Maeda , Yasushi Sekine , Tetsuya Watanabe
- 申请人地址: JP Kawasaki-shi
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Miles & Stockbridge P.C.
- 优先权: JP2008-068807 20080318
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; H01L21/02
摘要:
To improve a performance of a semiconductor device having a capacitance element. An MIM type capacitance element, an electrode of which is formed with comb-shaped metal patterns composed of the wirings, is formed over a semiconductor substrate. A conductor pattern, which is a dummy gate pattern for preventing dishing in a CMP process, and an active region, which is a dummy active region, are disposed below the capacitance element, and these are coupled to shielding metal patterns composed of the wirings and then connected to a fixed potential. Then, the conductor pattern and the active region are disposed so as not to overlap the comb-shaped metal patterns in the wirings in a planar manner.
公开/授权文献
- US20090236648A1 SEMICONDUCTOR DEVICE 公开/授权日:2009-09-24
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