发明授权
- 专利标题: Method for manufacturing thin film transistors
- 专利标题(中): 制造薄膜晶体管的方法
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申请号: US12216445申请日: 2008-07-03
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公开(公告)号: US08199269B2公开(公告)日: 2012-06-12
- 发明人: Takashi Hattori , Mutsuko Hatano
- 申请人: Takashi Hattori , Mutsuko Hatano
- 申请人地址: JP Chiba-Ken JP Hyogo-Ken
- 专利权人: Hitachi Displays, Ltd.,Panasonic Liquid Crystal Display Co., Ltd.
- 当前专利权人: Hitachi Displays, Ltd.,Panasonic Liquid Crystal Display Co., Ltd.
- 当前专利权人地址: JP Chiba-Ken JP Hyogo-Ken
- 代理机构: Stites & Harbison, PLLC
- 代理商 Juan Carlos A. Marquez, Esq
- 优先权: JP2007-181829 20070711
- 主分类号: G02F1/136
- IPC分类号: G02F1/136 ; G02F1/1333 ; H01L21/00 ; H01L21/469
摘要:
A method for manufacturing a thin film transistor including a step of forming a polymer film (a) to a layer above a support substrate, a step of forming a semiconductor element above the polymer film (a), and a step of separating the support substrate from the polymer film (a) formed with the semiconductor element in which the polymer film (a) has a thickness of 1 μm or more and 30 μm or less, a transmittance of 80% or higher to a visible light at a wavelength of 400 nm or more and 800 nm or less, a 3 wt % loss temperature of 300° C. or higher, and a melting point of 280° C. or higher.
公开/授权文献
- US20090015760A1 Method for manufacturing thin film transistors 公开/授权日:2009-01-15
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