Invention Grant
US08199789B2 Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
有权
用于RF功率输送到具有级联传输线路部分的气体放电激光器的布置
- Patent Title: Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
- Patent Title (中): 用于RF功率输送到具有级联传输线路部分的气体放电激光器的布置
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Application No.: US13090885Application Date: 2011-04-20
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Publication No.: US08199789B2Publication Date: 2012-06-12
- Inventor: Frederick W. Hauer , Patrick T. Tracy , R. Russel Austin
- Applicant: Frederick W. Hauer , Patrick T. Tracy , R. Russel Austin
- Applicant Address: US CA Santa Clara
- Assignee: Coherent, Inc.
- Current Assignee: Coherent, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Morrison & Foerster LLP
- Main IPC: H01S3/22
- IPC: H01S3/22
Abstract:
RF power is transmitted to a CO2 gas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of the RF power source to the operating impedance of the laser.
Public/Granted literature
- US20110194581A1 ARRANGEMENT FOR RF POWER DELIVERY TO A GAS DISCHARGE LASER WITH CASCADED TRANSMISSION LINE SECTIONS Public/Granted day:2011-08-11
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