发明授权
US08201926B2 Liquid ejecting head, liquid ejecting apparatus, and actuator 有权
液体喷头,液体喷射装置和致动器

  • 专利标题: Liquid ejecting head, liquid ejecting apparatus, and actuator
  • 专利标题(中): 液体喷头,液体喷射装置和致动器
  • 申请号: US12721230
    申请日: 2010-03-10
  • 公开(公告)号: US08201926B2
    公开(公告)日: 2012-06-19
  • 发明人: Masato Shimada
  • 申请人: Masato Shimada
  • 申请人地址: JP Tokyo
  • 专利权人: Seiko Epson Corporation
  • 当前专利权人: Seiko Epson Corporation
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Workman Nydegger
  • 优先权: JP2009-058759 20090311
  • 主分类号: B41J2/045
  • IPC分类号: B41J2/045
Liquid ejecting head, liquid ejecting apparatus, and actuator
摘要:
A liquid ejecting head includes a flow channel forming substrate in which pressure generating chambers in communication with nozzles are formed; a piezoelectric element made up of a first electrode formed over the flow channel forming substrate, a piezoelectric layer formed over the first electrode and a second electrode formed over the piezoelectric layer; and a coating film provided by coating the piezoelectric element, wherein a hollow section formed by removing the coating film and a part of the second electrode is provided at an area opposite to the piezoelectric element, and an inclination angle θ1 of an end face of the coating film defining the hollow section with respect to the flow channel forming substrate and an inclination angle θ2 of an end face of the second electrode defining the hollow section satisfy a relationship of θ2
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