发明授权
US08202677B2 Chemically-amplified positive resist composition and patterning process thereof
有权
化学扩增的正型抗蚀剂组合物及其构图工艺
- 专利标题: Chemically-amplified positive resist composition and patterning process thereof
- 专利标题(中): 化学扩增的正型抗蚀剂组合物及其构图工艺
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申请号: US12457327申请日: 2009-06-08
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公开(公告)号: US08202677B2公开(公告)日: 2012-06-19
- 发明人: Takanobu Takeda , Satoshi Watanabe , Youichi Ohsawa , Masaki Ohashi , Takeshi Kinsho
- 申请人: Takanobu Takeda , Satoshi Watanabe , Youichi Ohsawa , Masaki Ohashi , Takeshi Kinsho
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2008-181787 20080711
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G03F7/04 ; G03F7/028 ; G03F7/40
摘要:
There is disclosed a chemically-amplified positive resist composition comprising, as main components, (A) a base polymer, which contains one or more kinds of a monomer unit represented by the following general formula (1) and the like, and is an alkali-insoluble polymer whose hydroxyl group is partly protected by an acetal group while alkali-soluble when deprotected by an acid catalyst, (B) a sulfonium salt containing a sulfonate anion, (C) a basic component, and (D) an organic solvent. In a lithography technology by a photo resist, an extremely high temporal stability is necessary. In addition, it must give a good pattern profile not dependent on a substrate and have a high resolution power. There can be provided a chemically-amplified positive resist composition which can solve these problems simultaneously, a resist patterning process using the same, and a method for producing a photo mask blank.
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