发明授权
- 专利标题: Semiconductor structure of a display device and method for fabricating the same
- 专利标题(中): 显示装置的半导体结构及其制造方法
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申请号: US12815513申请日: 2010-06-15
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公开(公告)号: US08202770B2公开(公告)日: 2012-06-19
- 发明人: Yu-Cheng Chen
- 申请人: Yu-Cheng Chen
- 申请人地址: TW Hsinchu
- 专利权人: AU Optronics Corp.
- 当前专利权人: AU Optronics Corp.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Thomas|Kayden
- 优先权: TW96114024A 20070420
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A semiconductor structure of a display device and the method for fabricating the same are provided. The semiconductor structure is formed on a substrate having a TFT region and a pixel capacitor region thereon. A TFT, including a gate electrode, a source electrode, a drain electrode, a channel layer, and a gate insulating layer, is formed on the TFT region of the substrate. A pixel capacitor is formed on the pixel capacitor region, wherein the pixel capacitor comprises a bottom electrode formed on a bottom dielectric layer, an interlayer dielectric layer formed on the bottom electrode, a top electrode formed on the interlayer dielectric layer, a contact plug passing through the interlayer dielectric layer and electrically connected to the top and bottom electrodes, a capacitor dielectric layer formed on the top electrode, a transparent electrode formed on the capacitor dielectric layer and electrically connected to the drain electrode.
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