发明授权
US08202770B2 Semiconductor structure of a display device and method for fabricating the same 有权
显示装置的半导体结构及其制造方法

  • 专利标题: Semiconductor structure of a display device and method for fabricating the same
  • 专利标题(中): 显示装置的半导体结构及其制造方法
  • 申请号: US12815513
    申请日: 2010-06-15
  • 公开(公告)号: US08202770B2
    公开(公告)日: 2012-06-19
  • 发明人: Yu-Cheng Chen
  • 申请人: Yu-Cheng Chen
  • 申请人地址: TW Hsinchu
  • 专利权人: AU Optronics Corp.
  • 当前专利权人: AU Optronics Corp.
  • 当前专利权人地址: TW Hsinchu
  • 代理机构: Thomas|Kayden
  • 优先权: TW96114024A 20070420
  • 主分类号: H01L21/00
  • IPC分类号: H01L21/00
Semiconductor structure of a display device and method for fabricating the same
摘要:
A semiconductor structure of a display device and the method for fabricating the same are provided. The semiconductor structure is formed on a substrate having a TFT region and a pixel capacitor region thereon. A TFT, including a gate electrode, a source electrode, a drain electrode, a channel layer, and a gate insulating layer, is formed on the TFT region of the substrate. A pixel capacitor is formed on the pixel capacitor region, wherein the pixel capacitor comprises a bottom electrode formed on a bottom dielectric layer, an interlayer dielectric layer formed on the bottom electrode, a top electrode formed on the interlayer dielectric layer, a contact plug passing through the interlayer dielectric layer and electrically connected to the top and bottom electrodes, a capacitor dielectric layer formed on the top electrode, a transparent electrode formed on the capacitor dielectric layer and electrically connected to the drain electrode.
信息查询
0/0