发明授权
- 专利标题： Surface treatment for molecular bonding
- 专利标题（中）： 分子键合的表面处理
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申请号： US13122717申请日： 2009-10-27
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公开(公告)号： US08202785B2公开(公告)日： 2012-06-19
- 发明人: Arnaud Castex , Gweltaz Gaudin , Marcel Broekaart
- 申请人： Arnaud Castex , Gweltaz Gaudin , Marcel Broekaart
- 申请人地址： FR Bernin
- 专利权人： Soitec
- 当前专利权人： Soitec
- 当前专利权人地址： FR Bernin
- 代理机构： Winston & Strawn LLP
- 优先权： FR0857586 20081107
- 国际申请： PCT/EP2009/064121 WO 20091027
- 国际公布： WO2010/052151 WO 20100514
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; H01L21/31
摘要：
A method of bonding a first substrate to a second substrate by molecular bonding by forming an insulating layer on the bonding face of the first substrate, chemical-mechanical polishing of the insulating layer, activating a bonding surface of the second substrate by plasma treatment, etching an exposed surface of the insulating layer, and bonding together the two substrates together by molecular bonding wherein the etching is conducted after the chemical-mechanical polishing and before the bonding.
公开/授权文献
- US20110189834A1 SURFACE TREATMENT FOR MOLECULAR BONDING 公开/授权日：2011-08-04
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