A chip-scale ion-trap mass spectrometer driven by a monolithic photodiode array and a method of fabricating the same. A high-voltage photovoltaic source is located in proximity to the ion-trap mass spectrometer structure. The high-voltage photovoltaic source includes monolithically fabricated and serially connected photodiodes. An external light source illuminates the photodiodes to generate a high voltage across the photodiode array. An RF voltage modulation is attained by modulating the light source at a desired RF frequency. The high-voltage photodiode array may be monolithically fabricated in association with the ion-trap mass spectrometer. The photodiode array requires a small area compared to the ion-trap mass spectrometer size as the spectrometer typically possess a very small capacitance and a low power consumption.